Optical Engineering

Download e-book for iPad: Advanced MEMS Packaging by John H. Lau,Cheng Kuo Lee,C. S. Premachandran,Yu Aibin

By John H. Lau,Cheng Kuo Lee,C. S. Premachandran,Yu Aibin

ISBN-10: 0071626239

ISBN-13: 9780071626231

A accomplished advisor to 3D MEMS packaging tools and solutions

Written by way of specialists within the box, Advanced MEMS Packaging serves as a priceless reference for these confronted with the demanding situations created by way of the ever-increasing curiosity in MEMS units and packaging. This authoritative consultant offers state-of-the-art MEMS (microelectromechanical platforms) packaging concepts, comparable to low-temperature C2W and W2W bonding and 3D packaging.

This definitive source is helping you choose trustworthy, artistic, high-performance, strong, and economical packaging strategies for MEMS units. The ebook also will reduction in stimulating extra study and improvement in electric, optical, mechanical, and thermal designs in addition to fabrics, methods, production, checking out, and reliability. one of the issues explored:

  • Advanced IC and MEMS packaging trends
  • MEMS units, advertisement functions, and markets
  • More than 360 MEMS packaging patents and 10 3D MEMS packaging designs
  • TSV for 3D MEMS packaging
  • MEMS wafer thinning, dicing, and handling
  • Low-temperature C2C, C2W, and W2W bonding
  • Reliability of RoHS-compliant MEMS packaging
  • Micromachining and water bonding techniques
  • Actuation mechanisms and built-in micromachining
  • Bubble swap, optical change, and VOA MEMS packaging
  • Bolometer and accelerameter MEMS packaging
  • Bio-MEMS and biosensor MEMS packaging
  • RF MEMS switches, tunable circuits, and packaging

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Advanced MEMS Packaging by John H. Lau,Cheng Kuo Lee,C. S. Premachandran,Yu Aibin


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